Used Hyco Ml-348 Vacuum Diaphragm Pump for sale (11,987)

Condition: used, functionality: unexamined, machine/vehicle number: ML-348, Used Hyco ML-348 Vacuum Diaphragm Pump Model: ML-348-D37-SA Type: p-227/1 | 207/1 | p-173/2 Lhsdpfxow Evhzs Altsk Voltage: 230-400, 50/60 Hz Multiple units in stock.

Condition: like new (used), functionality: fully functional, Graham Vacuum Pump DF/SCH00058 Type: 2 067/180 20006 171 Lsdpfoznpagex Altshk ID no 12320594/1 Unused, ex stores stock. Unit was purchased as a spare, but never used.

Condition: used, Manufacturer: Pfeiffer Vacuum Ledpszdakiofx Altshk Type: Diaphragm vacuum pump Model: MVP 015-4 DC Article number: PK T05 160 Pumping capacity: 0.75 m³/h Supply voltage: 24 V DC ±10 % Rated current: 3.3 A Maximum current: 6.8 A Maximum speed: 1800 min⁻¹ Weight: 4.4 kg Year of manufacture: 2021 Serial number: 28748878 Condition: used Location: Kusel

Condition: good (used), functionality: fully functional, KNF Neuberger GmbH Mini diaphragm vacuum pump, N86 KN 18 Model: N86KN18 Contidtion: Used Technical Data: Laboport 230V AC 50Hz 0.65A 60W 2.4barü Ledpfx Ajrigdqsltohk General: Flow rate (flow rate at atmospheric pressure): 6l/min Ultimate vacuum: 100mbar abs. Operating overpressure: 2.4bar Hose connection ID: 4mm Permissible gas and ambient temperature: +5 to +40 °C Mains: 230V AC / 50Hz Protection class of the motor: IP20 Motor power P1: 60 W Current consumption: 0.65 A Dimensions LxHxW: 164x141x90mm

Condition: excellent (used), Year of construction: 2012, functionality: fully functional, machine/vehicle number: 129801012, overall weight: 1,750 kg, total length: 7,400 mm, total width: 1,700 mm, total height: 2,130 mm, power: 4 kW (5.44 HP), input frequency: 50 Hz, input current: 12 A, We offer this very well-maintained vacuum pump FBSW 2012nac vacuum packaging machine, manufactured in 2012. Vacuum pump AM120 NAC for shrink film and vacuum packaging machines Length x Width x Height: 1x 3100x1700x2130 cm - 750kg 1x 4300x1700x2000 cm – 1000kg (on wheels) This is a shrink machine consisting of 2 parts. Location: 65451 Kelsterbach Collection: EXW Kelsterbach / Self-collection For sale is a high-quality vacuum pump, model AM120 NAC, manufactured in Italy, suitable for shrink film and vacuum packaging machines. Technical data • Model: AM120 NAC • Drawing No.: 038501 • Year of manufacture: 2012 • Frequency: 50 Hz • Current consumption: 12 A • Power: 4 kW • Country of manufacture: Italy Condition The vacuum pump is in good used condition. The system is currently out of operation and switched off. Until it was shut down, it was used as intended. Other • Inspection possible by appointment. • Sale from the location 65451 Kelsterbach. • Self-collection by the buyer. Lsdpszcyvvjfx Altshk If you are interested or have any questions, please contact us. _____ If you have any further questions or require more information, please send us a message or call us.

Condition: used, functionality: unexamined, machine/vehicle number: AEPF71, power: 0.37 kW (0.50 HP), input voltage: 230 V, input frequency: 50 Hz, input current: 32 A, type of cooling: air, rotational speed (max.): 1,350 rpm, Used ATMA AEPF71 diaphragm pump Lhjdpfx Aljxp I Huotek Manufacturer: Atma Antriebstechnik Model: AEPF71 Voltage: 230V 50Hz

Condition: good (used), Busch Vacuum Pump Model 630 370 CFM Ledpjwa Nzqsfx Altohk

Condition: good (used), Busch Vacuum Pump Lhedpfx Aewa Ra Uoltok Model 400

Condition: good (used), Busch Vacuum Pump Ljdpfxjwa Ucgo Altshk Type: 400-212 235 CFM Dimensions: 1300 mm x 800 mm x 1100 mm.

Condition: good (used), Busch Vacuum Pump Model 400-212 Lhjdpfx Aswa Unpjltok

Condition: new, NEW & UNUSED VACUUBRAND PC 3004 VARIO SELECT CHEMISTRY PUMP STATION For sale is an absolutely new, unused VACUUBRAND VARIO® chemistry pump station, type PC 3004 VARIO select (purchased from HUBERLAB Switzerland, new price / list price: CHF 10,590). The unit comes from a project design / incorrect allocation and has never been put into operation or brought into contact with any media. HIGHLIGHTS & BENEFITS: - Integrated graphic touch controller VACUU·SELECT with pre-defined and freely programmable vacuum processes - Highly efficient, speed-controlled VARIO diaphragm pump for precise vacuum control and extremely quiet operation - Highest chemical and solvent resistance due to fluorinated plastics in the media area - Integrated suction-side separator (AK) and pressure-side emission condenser (EK) for optimal solvent recovery TECHNICAL DATA: • Type: PC 3004 VARIO select • Power connection: 200–230 V~, 50–60 Hz (with CH power cable) • Vacuum controller: VACUU·SELECT (touchscreen) • Cylinders / Stages: 4 cylinders / 3 stages • Max. pumping capacity: 4.6 m³/h (2.7 cfm) • Ultimate vacuum (abs.): 1.5 mbar (1.1 Torr) Lhedszv H Ukjpfx Altek • Ultimate vacuum with gas ballast (abs.): 3.0 mbar (2.2 Torr) • Max. back pressure (abs.): 1.1 bar • Motor rated power: 0.53 kW • Speed range: 30 – 2400 min⁻¹ • Protection class: IP 40 • Suction side connection: hose nozzle DN 6–10 mm • Pressure side connection: hose nozzle DN 8–10 mm • Dimensions (L x W x H): 419 x 243 x 457 mm • Weight: 21.1 kg CONDITION: 100% factory new, unused, with complete accessories. PAYMENT & LOGISTICS: • Invoicing: Sale is made against invoice (excluding VAT / tax-free intra-community delivery for companies in the EU with a valid VAT ID). • Currency & Payment: Billing in EUR. Bank transfer (SEPA) before collection or shipment. • Shipping / Transport: - Self-collection at the location (zip code 4226 Breitenbach / Basel region, Switzerland) is preferred. - Secure shipping via courier or freight forwarder (well-padded and packed on a pallet) within Switzerland and to the EU after consultation and upon assumption of costs.

Condition: used, A 124H, F4HE4CL06611010, Pfeiffer Vacuum, vacuum pump, SN:AP8086636 Lhodpfet Iggwjx Altsk Model: A 124H Type: F4HE4CL06611010 Condition: Used

Condition: new, Year of construction: 2026, Rotary dry vane vacuum pump. Pump completely new. 12 months warranty Marpa Vacuum pump with equivalent characteristics to the Becker VT 4.40 model. Unbeatable prices. Lhjdpfjftzd Sex Altsk Nominal flow: 40 m3 / h at 50Hz. Final vacuum: 150 mbar abs. Any clarification, do not hesitate to contact us.

Condition: excellent (used), Year of construction: 2018, functionality: fully functional, power: 34.3 kW (46.63 HP), input voltage: 460 V, input frequency: 50 Hz, input current: 43 A, type of input current: AC, Performance data & key technical specifications (derived): WHU 2500 nominal throughput approximately 430 m³/h (at 50 Hz) for the WH/WHU 2500 version. Inlet flange DN 250 ISO-K, outlet flange DN 100 ISO-K on WHU 2500. Water cooling of the motor/system. Lhodpox Aqa Defx Altok DV650S: Nominal suction capacity 650 m³/h at around 5×10⁻³ mbar ultimate vacuum.

Condition: used, Year of construction: 2023, operating hours: 100 h, functionality: fully functional, overall weight: 151 kg, total length: 1,174 mm, total width: 644 mm, total height: 528 mm, volume flow: 250 m³/h, power: 5.5 kW (7.48 HP), type of cooling: air, Becker VTLF 2.250 vacuum pump – manufactured in 2023 For sale is a Becker VTLF 2.250 vacuum pump from our carpentry workshop. The pump was purchased new in 2023 and, according to our assessment, has fewer than 100 operating hours, as it was only used very rarely. It is in very good condition and, to the best of our knowledge, is technically flawless. The original invoice from 2023 is available and can be viewed if there is serious interest. The VTLF 2.250 is a dry-running rotary vane pump designed for rough vacuum and continuous operation. It uses self-lubricating vanes made of a graphite composite, requires minimal maintenance, and does not require oil changes. Suitable for, among other applications, CNC vacuum tables, vacuum clamping systems, membrane presses, handling equipment, and other applications in the wood, plastics, and industrial sectors. Technical data: Manufacturer: Becker Model: VTLF 2.250 Year of manufacture: 2023 Designation: VTLF 2.250 C300127 Operating hours: approx. 100 Dry-running rotary vane pump for rough vacuum Oil-free Designed for continuous operation Self-lubricating vanes made of graphite composite Low maintenance Lhjdpfx Aljzi A D Istjk No oil change required Total power consumption: 5.5 kW Dimensions L/W/H: approx. 1,174 × 644 × 528 mm Weight: approx. 151 kg Inspection possible by arrangement. Location: Rebgeshain Sale from the location, without transport. Collection or shipping via a freight forwarder can be arranged. Price: €3,500 net, negotiable Sale exclusively to commercial customers. Used machine sold as is, with exclusion of any warranty for defects. No guarantee. Subject to prior sale.

Condition: used, This listing is for Pfeiffer MVP020 Vacuum Pump (MVP020) The unit is in full working condition and ready for immediate use Compact, oil-free diaphragm vacuum pump designed for clean and quiet operation. Ideal for laboratory processes requiring consistent vacuum such as filtration, drying, and rotary evaporation support. Robust build ensures long-term reliability with minimal maintenance. Transparency Report and Technical Audit: • Power-On Test: Verified; Digital display active, lighting operational, and fan system engaged. Notice for Procurement: This unit is sold As-Is. While we verify the power-on status and physical integrity, we do not perform analytical validation, fluidic testing, or operational calibration. Ideal for labs with in-house technical expertise or existing service agreements. Sustainability Impact: By choosing Direct Reuse, your facility avoids the carbon footprint of new manufacturing and prevents specialized materials from entering waste streams. Direct-to-Lab reuse is the most carbon-efficient way to equip a modern laboratory. Ledpjy Ehpqofx Altehk • Source Pedigree: Biotech / Research Facility • Condition: Direct-from-Bench (Decontaminated/Original) • Integrity: 100% Original Parts (Non-Refurbished)

Condition: like new (used), Year of construction: 2023, functionality: fully functional, overall weight: 54 kg, total length: 489 mm, total width: 390 mm, total height: 454 mm, power: 3.6 kW (4.89 HP), input frequency: 60 Hz, TAWI's powerful vacuum pump is engineered for heavy lifting tasks where reliability and high performance are critical. The direct-drive design reduces friction and wear, ensuring minimal downtime and a stable, efficient vacuum capacity—ideal for demanding industrial and logistics environments. Lhedpfeytq D Sjx Altok - High Performance: Stable vacuum power for heavy lifting using TAWI vacuum lifters VM60–270 (VM160–300). - Direct-Driven Pump System: Reduced friction and unnecessary wear result in a longer service life and fewer maintenance requirements. - Dual-stage Side Channel Blower: Air-cooled design minimizes overheating risk and improves operational stability. - Energy-Efficient IE3 Motor: Reduces energy consumption and operating costs. - Optional Sound-Absorbing Hood: Lowers noise levels in the work area. - Robust Industrial Construction: Designed for long-term operation with minimal downtime. - Noise Level: Typically 71–73 dB(A) depending on model. - Protection Class IP55: Suitable for industrial environments.

Condition: excellent (used), Vacuubrand Chemical Diaphragm Pump Here, we offer a Vacuubrand chemical diaphragm pump. VACUUBRAND VARIO Chemical Diaphragm Pump MV 10C EX VARIO Technical data: Max. pumping capacity 50Hz 8.1 m³/h Ultimate vacuum 2 mbar / 1.5 torr Ultimate vacuum with gas ballast 10 mbar / 7.5 torr Number of cylinders 8 Number of stages 4 Vacuum display / controller type without controller Ambient temperature, lower limit, operation, in °C 10°C Ambient temperature, upper limit, operation, in °C 40°C Ambient temperature, lower limit, storage, in °C -10°C Ambient temperature, upper limit, storage, in °C 60°C Max. outlet pressure absolute in bar 1.1 bar Suction-side connection small flange KF DN 25 Pressure-side connection small flange KF DN 16 Lhjdpfjzgci Ssx Altok Rated power in kW 0.5 kW Minimum speed VARIO in min-1 30 min-1 Maximum speed in min-1 1500 min-1 Nominal speed in min-1 1500 min-1 IP protection class according to IEC 60529 IP 54 Dimension L in mm 560 mm Dimension W in mm 457 mm Dimension H in mm 410 mm Weight in kg 61 kg Noise (sound pressure level) in dBA at 50 Hz or 1500 rpm/62% (VARIO)/1500 rpm (VARIO-SP)/12500 rpm (VACUU·PURE®) 42 dBA EX approval pumping chamber (pumped gases): II 2G Ex h IIC T3 Gb X, outdoor area with inert gas purging: II 2G Ex h IIB T4 Gb X, outdoor area without inert gas purging: II 3G Ex h IIB T4 Gc X, motor: II 2G Ex db IIB T4 Gb NRTL certification No Nominal voltage range 1 (in V) 230 V Mains frequency voltage range 1 (in Hz / DC) 50 Hz Weight 61 kg Type: MV 10C EX VARIO Condition: used Scope of delivery: (See picture) (Changes and errors in the technical data are subject to change!) We will be happy to answer any further questions you may have over the phone.

Condition: used, This listing is for a QuattroFlow QF150 Diaphragm Pump. The unit is in full working condition and is ready for immediate release. The Quattroflow 150S is a 4-piston Diaphragm pump, which is mainly used to pump water-like fluids that are typically handled in research-, pilot plant- or production facilities of the pharmaceutical, biotech,food or cosmetic research centres or plants Examples: • Solutions containing proteins (albumin, IgG, Clotting factors, monoclonal antibodies, enzymes, vaccines.) • Solutions of polymers or suspensions (silicon, latex, chromatography media) • Cell suspensions (bacteria, yeast, algae, fungi, mammalian cells) • colloidal solutions Lhodjxx Avpjpfx Altjk • Suspensions of viruses or phage • Dairy products • Gelatine • Supplements and ingredients for cosmetic and food Flow rate max.: Eccentric shaft 3° l/h (lpm) 100 (1.67) 100 (1.67) Eccentric shaft 5° l/h (lpm) 180 (3) 180 (3) Flow rate min.: Eccentric shaft 3° l/h (lpm) 1 (0.017) 1 (0.017) Eccentric shaft 5° l/h (lpm) 1 (0.017) 1 (0.017) Pressure: Temperature of fluid < 40°C bar (psi) 6 (87) 6 (87) Temperature of fluid > 40°C bar (psi) 4 (58) 4 (58) Temperature max.: Fluid °C (°F) 80 (176) 80 (176) CIP °C (°F) 90 (194) 90 (194) SIP °C (°F) 130 (260) 130 (260) Autoclave °C (°F) 130 (260) 130 (260) Suction lift dry at: 3000 rpm 3000 rpm Eccentric shaft 3° m (ft) 1-1,5 (3.2-4.9) 1-1,5 (3.2-4.9) Eccentric shaft 5° m (ft) 2-3 (6.6-9.8) 2-3 (6.6-9.8) Volume specifications: Approximated volume per revolution at free output ml 0,72 (3°) 1,2 (5°) 0,72 (3°) 1,2 (5°) Filling volume without connectors ml 15 15 Residual volume (after idle with highspeed motor) ml 1-3 1-3 Product wetted surface (approx.) cm² (inch²) 112 (17) 112 (17) Speed range pump rpm 10-3000 10-3000 Connection specification inlet (standard) Connector " 1/4" TC 1/4" TC Flange diameter mm (inch) 25 25 Internal diameter mm (inch) 4,7 4,7 Connection specification outlet (standard) Connector " 1/4" TC 1/4" TC Flange diameter mm 25 25 Internal diameter mm (inch) 4,7 (0.19) 4,7 (0.19) Position of connectors Inline Inline Number of flow directions 4 4 Diameter drive shaft mm 7 7 Product wetted materials (standard): Pump housing SS316L SS316L Valve plate SS316L SS316L Diaphragms Santoprene Santoprene Valves EPDM EPDM O-rings EPDM EPDM Non-product wetted materials (standard): Pump housing SS316L SS316L Bearing housing SS316L SS316L Base plate SS316 SS316 Hood SS316 SS316 Dimensions pump with motor and housing: Length mm (inch) 257 (10,2) 277 (10-91) Width mm (inch) 164 (6,5) 200 (7,87) Height mm (inch) 185 (7,2) 195 (7,67) Weight pump with motor and housing kg (lb) 9,8 (22) 11,2 (25) IP protection class pump IP 54 54 Operating temperature range °C (°F) 0…40 (32…104) 10…30 (50…86)

Condition: excellent (used), Year of construction: 2023, BINDER VD 56 Vacuum Drying Oven with VD-M 53 Pump Module Manufacturer: BINDER GmbH Type: VD 56 Year of Manufacture: 2023 Machine Type: Vacuum Drying Oven Internal Volume: 55 liters Maximum Temperature: 220 °C Offered is a BINDER VD 56 vacuum drying oven from 2023, including a matching BINDER VD-M 53 pump module and a BINDER VAP 1 vacuum pump. The system is designed for gentle drying of materials under vacuum conditions and is particularly suitable for laboratory, research, development, quality control, and industrial process applications. Lodpjzt R D Refx Altjhk Technical Data: Manufacturer: BINDER GmbH Model: VD 56 Article Number: 9630-0002 Version: VD056-230V Year of Manufacture: 2023 Internal Volume: 55 l Temperature Range: +9 °C above ambient temperature to +220 °C Heating Time to 100 °C: approx. 80 min Spatial Temperature Deviation at 100 °C: ± 1.2 K Temporal Temperature Deviation at 100 °C: ± 0.1 K Leak Rate: 0.01 bar/h Vacuum Connection: DN 16 Measurement Port: DN 16 Rated Voltage: 200–230 V Mains Frequency: 50/60 Hz Rated Power: 1.4 kW Protection Class: IP20 Made in Germany Pump Module: Manufacturer: BINDER GmbH Type: VD-M 53 Article Number: 8012-1943 Year of Manufacture: 2023 Voltage: 200–230 V / 50–60 Hz Power: 1.80 kW Current Consumption: 8.0 A Phase: 1N~ Protection Class: IP20 Vacuum Pump: Manufacturer: BINDER GmbH Type: VAP 1 Article Number: 5013-0217 Year of Manufacture: 05/2023 Pumping Capacity: 2.0 / 2.2 m³/h Ultimate Pressure: < 7 mbar Voltage: 230 V Frequency: 50/60 Hz Current Consumption: 1.6 / 1.5 A Protection Class: IP40 Dimensions: VD 56 without attachments and connections: Width: approx. 638 mm Depth: approx. 461 mm Height: approx. 815 mm Internal Dimensions: approx. 400 × 343 × 400 mm (W × D × H) Net Device Weight VD 56: approx. 96 kg Maximum Load per Shelf: 20 kg Maximum Total Load: 60 kg Equipment: Digital controller with pressure and temperature display Program-controlled drying monitoring Automatic ventilation at the end of the process Internal data logger Ethernet interface Universal ventilation for inert gas or ambient air Vacuum connection DN 16 Measurement port DN 16 Safety glass pane with splinter protection Large viewing window Insert shelf BINDER VD-M 53 pump module BINDER VAP 1 vacuum pump Vacuum and connection hoses Connecting and mounting parts Operating and assembly instructions Further accessories as shown in the pictures Shipping Data: Weight VD 56: approx. 96 kg Due to size and weight, shipping by freight forwarder is required. Condition: Used Year of Manufacture 2023 Optical condition as shown in the pictures Nameplates are present Scope of Delivery: 1 × BINDER VD 56 Vacuum Drying Oven 1 × BINDER VD-M 53 Pump Module / Pump Cabinet 1 × BINDER VAP 1 Vacuum Pump Vacuum and connection hoses Connecting and mounting parts Connection cables Operating and assembly instructions Accessories as shown in the pictures The unit is available for short-term delivery. Scope of delivery as shown in the pictures. Subject to change, errors and prior sale.

Condition: excellent (used), functionality: fully functional, Pfeiffer Vacuum GmbH Turbomolecular Vacuum Pump, PM P02 420 C, TMH 520 Model: PMP02420C Type: TMH520 Condition: Used Lhsdoxpu Sqjpfx Altok

Condition: good (used), Year of construction: 2013, overall weight: 560 kg, Pump technical data: • Manufacturer: KSB • Type: ETIC D 65 / 45-1 • Capacity: Q = 45 m³/h • Head: H = 182.19 m • Year of manufacture: 2013 • Flange connections (visually DN150 – as shown in photos) • Solid, industrial construction • Pump dismantled from an industrial installation Electric motor: • Manufacturer: Siemens • Power: 37 kW • Supply: 3-phase • Speed: approx. 2950 rpm (50 Hz) • Industrial design, IC411 cooling • Mounting: IM B3 • Motor mounted on frame together with pump Lhedpsydv I Djfx Altjk Condition: • Technical condition: used • Visually normal signs of use, no cracks or damage to the housing • Shafts and flanges complete (visible in the photos) • Sold as a set: pump + motor + frame Additional information: • Ideal for industrial applications: process installations, energy, chemical, process water • Price quoted per unit.

Condition: used, This listing is for a Biotek Instruments Vacuum pump 2 The unit is in full working condition and is ready for immediate release. BioTek Instruments GAST Vacuum Pump 7103034 Overview The BioTek Instruments GAST Vacuum Pump 7103034 is a high-performance, oil-less rocking piston compressor and vacuum pump designed for use with a variety of microplate washers, including the EL 406, 405 TS, 405 LS, and ELx405. Key Features Standard Vacuum Pump: Ideal for a wide range of applications. Oil-less Rocking Piston Compressor: Ensures outstanding performance and durability. Flexibility and Durability: Suitable for various laboratory settings. Easy to Retrofit: Simple installation and integration with existing systems. Ledpfx Ajxwc I Neltjhk Low Exhaust Temperatures: Reduces the risk of overheating and extends the pump's lifespan. Longer Life Span: Built to last, minimizing the need for frequent replacements. Voltage: Operates at 115-230V. Max Vacuum: 26 in -hg. Sound Level: Less than 65 db(A). Product Information Compressor Type: Standard Vacuum Pump Port Size: 1/4 in NPT End Connections: NPT Phase: Single Maximum RPM: 1725 RPM; 1425 RPM Minimum Working Temperature: 5°C Maximum Working Temperature: 40°C Standards: CE; UL For Use With: 405 ls, 405 touch, el406, elx405 microplate washers Voltage: 115 - 230V Sound Level: Less than 65 db(A) Max Vacuum: 26 in -hg Specifications Weight Metric: 11.34 kg Imperial: 25 lb Dimensions Metric: 35.56 cm x 25.4 cm x 33.02 cm Imperial: 14 in x 10 in x 13 in Harmonized Code: 84141000 Harmonized Code Details: Vacuum pumps; liquid ring vacuum pumps and other rotary positive displacement pumps Availability eBay: This vacuum pump is listed on eBay with free shipping for many products. Sellers typically respond within 24 hours to assist with any inquiries or specific configurations.

Condition: used, functionality: unexamined, input voltage: 345 V, input frequency: 87 Hz, input current: 4 A, rotational speed (max.): 5,000 rpm, Elmo Rietschle G-BH1 BH1430 Vacuum Blower, new Manufacturer: Elmo Rietschle / Gardner Denver Model: G-BH1 BH1430-7A221 Lodpfx Aszv Sn Nsltohk Adjustable speed, Voltage: 380 Volt, 50 Hz.

Condition: used, Leybold A700 Q deposition system (ebeam) Lsdjuhcnijpfx Altjhk Leybold A700 deposition system: Was used for deposition Titanium - Gold (ebeam) Ebeam deposition unit (Leybold) Vacuum pump Leybold D40-65B + Diffusion pump 2kW Proceschamber: Size: Width 680mm x Height 680mm x Depth 550mm Substrateholder diameter 650mm Incl. shielding Oring door Heaters Basepressure low 10-6mbar Electronics: Baseline cabinet (eneeds upgrade) Old PLC (for pump/vent) Gas cabinet/water: Various valves/flow reducers for gas and water Note: D&M Vacuumsystems can upgrade the system to new processes (E-beam or Sputter) incl. new electronics and software. EUR 37.500,-