Wetbench-SystemRobotechnik Europe
OPTIwet ST30
Wetbench-System
Robotechnik Europe
OPTIwet ST30
Condition
Used
Location
Germany 

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Machine data
- Machine type:
- Wetbench-System
- Manufacturer:
- Robotechnik Europe
- Model:
- OPTIwet ST30
- Condition:
- ready for operation (used)
Price & Location
- Location:
- Deutschland

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Details about the offer
- Listing ID:
- A206-18495
- Reference number:
- INNO30389
- Update:
- 26.11.2025
Description
System for wet chemical processing of wafers up to 12in, substrates up to X/Y 9in/9in, stand-alone housing, process modules, PP process chamber, 2 programmable media arms, rotational speed 1-4000rpm, acceleration ramp 1-3000rpm, spin time 1-999s, exhaust process bowl 2x DN110, chamber 2x DN110, housing 1x DN110, control 1x DN110 (each approx. 200m³/h), CDA 8+/-2bar, vacuum -0.8+/-0.2bar, nitrogen 4.0+/-0.5bar, 3 media drains, waste box for 2 concentrate wastes, reagent box with pressure vessel, 4 Julabo thermostat baths. The system was dismantled during disassembly. Viewing possible by arrangement.
Ndjdpfx Asxzii Uja Hjd
Ndjdpfx Asxzii Uja Hjd
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Registered since: 2017
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